High Quality Spectropur Pressure Control Panels for Semiconductor Gases - Performance and Safety Combined

The Spectropur Pressure Control Panels for Semiconductor Gases are expertly engineered for ideal management and regulation of semiconductor gases. Offering Quality 6.0 standards, these panels possess a multitude of critical features that assure outstanding performance and enduring longevity.

• They are equipped with crucial elements such as a waste gas valve, manual process gas (EMO-) valve, and purge gas valve, allowing easy control and administration of gas flow, and reducing the potential for operational issues.
• These panels feature a backflow preventer in the purge gas line, acting as a safety measure against unexpected gas reverse flow.
• Equipments like a pre-filter, a pressure regulator, a burst disc, and a filter are integrated to ensure particle-free process gas supply, therefore maintaining the purity and precision of the gas supply.
• For enhanced safety, a process gas line shut-off valve is incorporated to prevent gas leaks and other potential hazards.
• The panels are built with robust and resistant materials such as stainless steel 1.4404 ESU, Hastelloy C, and PCTFE, which can endure rigorous usage.
• These pressure control panels are tested with a 100% helium leak rate and assembled in a cleanroom class ISO 5.0, guaranteeing superior quality and reliability.
• Technical Specifications:
  • Materials: Body and other gas wetted parts: Stainless steel 1.4404 ESU (SS 316L remelted)
    Diaphragm: Hastelloy C276
    Valve seat and stem: PCTFE
  • Surface Roughness: Ra ≤ 0.25 μm, optional: Ra ≤ 0.18 μm
  • Leak Rate: To atmosphere: < 1 x 10-9 mbar l/s He, via seat: < 1 x 10-6 mbar l/s He
  • Cv-value: 0.24 (kv = 0.2)
  • Temperature Range: -20°C to 70°C