High Quality Spectropur Pressure Control Panels for Semiconductor Gases - Performance and Safety Combined

Short description

Introducing the top-tier Spectropur Pressure Control Panels MP2, the benchmark for semiconductor gas control systems. Key attributes encompass:

  • Custom Design: Specifically engineered for precise semiconductor gas control.
  • High-End Components: Features a pre-filter, pressure regulator, burst disc, and a contaminant-free gas supply filter.
  • Secured Operation: Includes shut-off valve and check valve to counter backflow in the gas line.
  • Robust Construction: All gas-contact parts are manufactured with stainless steel 1.4404 ESU, Hastelloy C, and PCTFE for enhanced longevity and tolerance to severe conditions.
  • Certified Manufacturing: Ensured quality via ISO 5.0 cleanroom assembly and 100% helium-leak testing.

Count on Spectropur Pressure Control Panels MP2 for your high-demand semiconductor gas control requirements.

Quantity :
  • Procurenet Team Tshim Sha Tsui
    Hong Kong Hong Kong 3 years
Delivery options
  • 7 Days Return Back Policy
  • 2 Days Cancellation Policy
  • Ship Only

The Spectropur Pressure Control Panels for Semiconductor Gases are expertly engineered for ideal management and regulation of semiconductor gases. Offering Quality 6.0 standards, these panels possess a multitude of critical features that assure outstanding performance and enduring longevity.

  • They are equipped with crucial elements such as a waste gas valve, manual process gas (EMO-) valve, and purge gas valve, allowing easy control and administration of gas flow, and reducing the potential for operational issues.
  • These panels feature a backflow preventer in the purge gas line, acting as a safety measure against unexpected gas reverse flow.
  • Equipments like a pre-filter, a pressure regulator, a burst disc, and a filter are integrated to ensure particle-free process gas supply, therefore maintaining the purity and precision of the gas supply.
  • For enhanced safety, a process gas line shut-off valve is incorporated to prevent gas leaks and other potential hazards.
  • The panels are built with robust and resistant materials such as stainless steel 1.4404 ESU, Hastelloy C, and PCTFE, which can endure rigorous usage.
  • These pressure control panels are tested with a 100% helium leak rate and assembled in a cleanroom class ISO 5.0, guaranteeing superior quality and reliability.
  • Technical Specifications:
    • Materials: Body and other gas wetted parts: Stainless steel 1.4404 ESU (SS 316L remelted)
      Diaphragm: Hastelloy C276
      Valve seat and stem: PCTFE
    • Surface Roughness: Ra ≤ 0.25 μm, optional: Ra ≤ 0.18 μm
    • Leak Rate: To atmosphere: < 1 x 10-9 mbar l/s He, via seat: < 1 x 10-6 mbar l/s He
    • Cv-value: 0.24 (kv = 0.2)
    • Temperature Range: -20°C to 70°C
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